Syllabus:Materials for MEMS – Silicon – Silicon compounds – Silicon Nitride, Silicon Dioxide, Silicon carbide, Poly Silicon, GaAs , Silicon Piezo resistors, Polymers in MEMS – SU-8, PMMA, PDMS, Langmuir – Blodgett Films, Micro System fabrication – Photolithography – Ion implantation- Diffusion – Oxidation – Chemical vapour deposition – Etching