MEMS
Module 2
module 2
Syllabus: Flexural beams: Types of Beams, longitudinal strain under pure bending – Deflection of beams – Spring constant of cantilever – Intrinsic stresses Actuation and Sensing techniques : Thermal sensors and actuators, Electrostatic sensors and actuators , Piezoelectric sensors and actuators, magnetic actuators
notes & PPT


