MEMS

Module 2

module 2

Syllabus: Flexural beams: Types of Beams, longitudinal strain under pure bending – Deflection of beams – Spring constant of cantilever – Intrinsic stresses Actuation and Sensing techniques : Thermal sensors and actuators, Electrostatic sensors and actuators , Piezoelectric sensors and actuators, magnetic actuators

notes & PPT

MEMS Module 2.pdf
Module 2 question bank.pdf
MEMS mod 2.pdf