Syllabus: MEMS and Microsystems: Applications – Multidisciplinary nature of MEMS – principles and examples of Micro sensors and micro actuators – micro accelerometer –comb drives - Micro grippers –micro motors, micro valves, micro pumps , Shape Memory Alloys. Review of Mechanical concepts: Stress, Strain, Modulus of Elasticity, yield strength, ultimate strength – General stress strain relations – compliance matrix. Overview of commonly used mechanical structures in MEMS - Beams, Cantilevers, Plates, Diaphragms – Typical applications